The secondary had another error where it couldn't stop on a full step. 0 0 F Modu="mir_o_MoveOneGalil"; Text=" Sec returned an error message" 0 0 I Received="?GOCORR one or more axes did not end on a full step 0, 0, 0, 0, 1" 0 0 W Text="failed to adjust collimation and focus"